Microelectromechanical System (MEMS) devices are being developed swiftly for new applications. Unfortunately, innovative assembly and test apparati have not kept pace with the MEMS development. Building on its experience in the design and production of micro-force testing systems for the composite industry, as well as the use of state-of-the-art microhardness and nanoindentor equipment, Touchstone has developed a next-generation micro-force testing systems that can perform tension, compression, flex, peel, and shear measurements on structures as small as 10x10 microns. Touchstone’s technical approach draws on a broad base of industrial problem solving and materials testing experience and is based on the company’s recent accomplishments in incorporating micro-force testing systems into scanning electron microscopes (SEMs).

This invention has won an R&D 100 Award and has been licensed to Agilent Technologies, a leading provider of material testing solutions.